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MEMS acceleration switch capable of increasing threshold acceleration

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4 Author(s)
Kim, H.-S. ; Dept. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., Seoul, South Korea ; Jang, Y.-H. ; Kim, Y.-K. ; Kim, J.-M.

A micromachined acceleration switch capable of increasing the threshold acceleration is proposed. Comb drive actuators were used to tune the threshold acceleration. The acceleration switch was successfully fabricated using a silicon-on-glass process. Switching characteristics were measured in a centrifugal chamber and a turn-on response time was 0.38 ms. The threshold acceleration was 11 g without a tuning voltage, and it was effectively increased up to 30 g with a tuning voltage of 30 V at the comb actuators, which is about 270% increased threshold compared to the initial threshold with zero tuning voltage.

Published in:

Electronics Letters  (Volume:48 ,  Issue: 25 )

Date of Publication:

December 6 2012

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