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Accurate alignment of a photonic crystal nanocavity with an embedded quantum dot based on optical microscopic photoluminescence imaging

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4 Author(s)
Kojima, T. ; Department of Electronic Science and Engineering, Kyoto University, Kyotodaigaku-katsura, Nishikyo-ku, Kyoto 615-8510, Japan ; Kojima, K. ; Asano, T. ; Noda, S.

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We have developed a technique to align a two-dimensional photonic-crystal nanocavity (PCNC) with an indium arsenide/gallium arsenide self-assembled quantum dot (QD), using microscopic photoluminescence (μ-PL) spectroscopy to image a wafer with a low-density of QDs and pre-formed positioning marks. Individual QD emission wavelengths were evaluated from μ-PL spectra, and positions relative to the marks were determined. The wavelength detuning between the QD-emission peak and the PCNC resonant frequency was < 4 nm, and the alignment standard deviation was < 50 nm. The emission peaks of a single QD and a PCNC aligned by this technique showed anti-crossing, implying high accuracy.

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Applied Physics Letters  (Volume:102 ,  Issue: 1 )