Development of linear ultrasonic motor using beam and multilayer piezoelectric actuator

A linear ultrasonic motor (LUSM) using two parallel beams and two multilayer piezoelectric actuators (MPAs) was developed. The two MPAs are fixed in alignment across the beams. The force and displacement generated by the MPAs are converted in the orthogonal direction by the deforming of the beams. Hence, when MPAs are driven by alternating voltages with π/2 phase difference, elliptical displacement motions are generated on the surface of beams. An object touching surfaces of beams can be transferred. Characteristics of the LUSM made as a trial had been obtained as the maximum speed of 41 mm/s and maximum thrust of 3.4 N at the operating voltage of 20 V
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