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Characteristics of a cylindrical collector mirror for laser-produced xenon plasma soft X-rays and improvement of mirror lifetime by buffer gas

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6 Author(s)
Inoue, Tomoaki ; Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori, Ako-gun, Hyogo 678-1205, Japan ; Mochizuki, Takayasu ; Miyamoto, Shuji ; Masuda, Kazuya
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The focusing characteristics of a ruthenium-coated cylindrical mirror were investigated on the basis of its ability to collect and focus broadband 5–17-nm soft X-rays emitted from a laser-produced plasma. Based on the plasmas spectral intensity distribution and the reflectivity function of the mirror, we defined the optimum position of the integrated cylindrical mirror at which the X-ray energy flux transported and focused through the mirror was maximum. A minimum spot diameter of 22 mm at a distance of approximately 200 mm from a soft X-ray source was confirmed. The maximum intensity of the collected soft X-rays was 1.3 mJ/cm2 at the center of the irradiation zone. Thus, the irradiation intensity was improved by approximately 27 times when compared to that of 47 μJ/cm2 without the mirror. The debris sputtering rate on the reflection surface of the mirror can be reduced to 1/110 by argon gas at 11 Pa, while the attenuation rate of the soft X-rays due to absorption by the buffer gas can be suppressed to less than 10% at the focal point. The focusing property of the mirror is expected to be maintained for 3000 h or longer without significant degradation for a 100 W/320 pps laser shot if the ruthenium layer is thicker than 10 μm. These results suggest that a stand-alone broadband soft X-ray processing system can be realized by using laser-produced plasma soft X-rays.

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Review of Scientific Instruments  (Volume:83 ,  Issue: 12 )