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Low-Voltage Atmospheric-Plasma Generation by Utilizing Afterglow Initiation Carrier

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2 Author(s)
Lee, L. ; Sch. of Electron. & Electr. Eng., Hongik Univ., Seoul, South Korea ; Youngmin Kim

Low-voltage atmospheric-plasma generation is reported, in which the breakdown voltage is significantly reduced by utilizing afterglow ions generated on integrated electrodes. Using micromachining techniques, a microanode and two microcathodes were integrated on a glass substrate. Atmospheric glow discharge was first generated in the narrow gap of 10 μm, and the resulting afterglow ions were utilized as an initiation carrier in a subsequent discharge induced in the wide gap of 270 μm. In the presence of the initiation carrier, the atmospheric glow discharge was generated at a substantially low voltage. The feasibility of the proposed generation scheme as an efficient compact plasma source is also evaluated.

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Plasma Science, IEEE Transactions on  (Volume:41 ,  Issue: 1 )