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Due to the growth of the Flat Panel Display (FPD) industry and the Thin Film Solar-cell industry, high performance of Glass Substrate Transfer Robot(GTR) is required. For a precise handling of the glass substrate with high speed, it is very important to reduce meandering of the end of robot hand. Meandering along the path of the GTR can be affected by the deflection of vertical axis structure and elasticity of arm belts. Therefore in order to predict the meandering, dynamic modeling for GTR system with torsion of vertical axis structure and elasticity of arm belts is required. This paper proposes a modeling method for GTR system using 5-revolute joints. The GTR system is considered to be a 5-revolut joints and 5-link system, applying torque transmissiion model for each joint. The proposed model is compared with the actual path of the end of robot hand which was obtained by real-world experiment, in order to verify that the proposed GTR system is valid.