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Micron-sized Hall sensors made of epitaxial graphene grown on 4H-SiC(0001) have been fabricated and studied at room temperature using transport and noise spectrum measurements. We report detection of 1-μm Dynal bead with the magnetic moment of ~4×108 μB, using a 2-μm epitaxial graphene device. A phase-sensitive AC-DC Hall magnetometry method was used to reliably detect the bead with a relatively large response of VxAC ~ 7 μV. Bead positioning was performed using a nanomanipulator inside of the FIB system. Long-term effect of the small dose of e-beam irradiation (~4 × 1014 e/cm2) on the performance of graphene Hall devices is reported.
Date of Publication: Jan. 2013