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This paper presents a new physical model for shielded slow-wave coplanar waveguide structures. This lossy electrical model is based on physical behavior of the transmission lines. It allows a better understanding of the losses distribution along the structure. The ohmic losses in the coplanar strips, as well as the ohmic losses and the eddy current losses in the floating shield strips are studied for transmission lines having different geometrical dimensions and hence electrical characteristics. The model is then validated on different CMOS technologies and leads to the efficient optimization of the slow-wave transmission lines, especially concerning the floating shield dimensions.