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1060-nm Tunable Monolithic High Index Contrast Subwavelength Grating VCSEL

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4 Author(s)
Ansbaek, T. ; Dept. of Photonics Eng., Tech. Univ. of Denmark, Lyngby, Denmark ; Il-Sug Chung ; Semenova, E.S. ; Yvind, K.

We present the first tunable vertical-cavity surface-emitting laser (VCSEL) where the top distributed Bragg reflector has been completely substituted by an air-cladded high-index-contrast subwavelength grating (HCG) mirror. In this way, an extended cavity design can be realized by reducing the reflection at the semiconductor-air interface using an anti-reflective coating (ARC). We demonstrate how the ARC can be integrated in a monolithic structure by oxidizing AlGaAs with high Al-content. The HCG VCSEL has the potential to achieve polarization stable single-mode output with high tuning efficiency. The HCG VCSEL shows a total tuning range of 16 nm around an emission wavelength of 1060 nm with 1-mW output power.

Published in:

Photonics Technology Letters, IEEE  (Volume:25 ,  Issue: 4 )