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Electrowetting on Dielectric (EWOD)-Based Thermo-Responsive Microvalve for Interfacing Droplet Flow With Continuous Flow

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3 Author(s)
Ahamedi, M.J. ; Dept. of Mech. & Ind. Eng., Univ. of Toronto, Toronto, ON, Canada ; Ben-Mrad, R. ; Sullivan, P.

This paper reports on a hybrid electrowetting-thermal passive microvalve for a flow control mechanism to interface droplet flow with continuous flow. When heated, a thermo-responsive polymer, in the form of a dilute aqueous droplet, forms a gel, and upon cooling, it liquefies. The gel blocks and its subsequent liquefaction unblocks the pressurized flow. Electrowetting on dielectric (EWOD) actuation was used to control and position a polymer droplet at a desired valving location. The valve interfaced a pressurized flow to a planar EWOD-based droplet flow in a single device. It was fabricated using a standard planar microfluidic glass platform. It has a three-layer architecture bonded by oxygen plasma bonding. The valve demonstrated zero leakage and no cross-mixing across the interface.

Published in:

Microelectromechanical Systems, Journal of  (Volume:22 ,  Issue: 3 )

Date of Publication:

June 2013

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