Skip to Main Content
Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.4772399
We present a simple method, based on the modification of a widespread atomic force microscope, that allows the simultaneous acquisition of the sample topography and RF spectra at the nanoscale minimizing the parasitic capacitance of the cantilever. We used a microcantilever set with its long axis perpendicular to the specimen surface and connected to a vector network analyzer (RF range 100 kHz–8.5 GHz) to measure RF impedance signal variations at the cantilever apex-sample interface. The RF impedance signal was found highly sensitive to very short probe-to-sample distances (<50 nm) and to material properties at the interface.