Referenced Items are not available for this document.
Surface acoustic wave (SAW) devices coated with a thin layer of chemoselective material provide highly sensitive chemical sensors for the detection and monitoring of vapors and gases. In this work, a variety of coating materials and coating deposition techniques have been evaluated on SAW devices. A new technique, matrix assisted pulsed laser embossing, is utilized to deposit polymer films on SAW devices, and conventional pulsed laser deposition is used to deposit a passivation layer of diamond-like-carbon on a SAW device surface. Both the electrical characteristics and the performance of the prepared devices against different gases have been determined
Published in:
Frequency Control Symposium, 1997., Proceedings of the 1997 IEEE International
Date of Conference: 28-30 May 1997
- Page(s):
- 140 - 146
- Meeting Date :
- 28 May 1997-30 May 1997
- Print ISBN:
- 0-7803-3728-X
- INSPEC Accession Number:
- 5842113
- Conference Location :
- Orlando, FL
- Digital Object Identifier :
- 10.1109/FREQ.1997.638535
- Product Type:
- Conference Publications
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