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The effect of power on duty cycle on the pulsed RF discharge and the pulsed RF plasma jet array

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1 Author(s)
D. W. Liu ; National State Key Lab of Advanced Electromagnetic Engineering and Technology, Huazhong University of Science and Technology, WuHan, HuBei 430074, China

Summary form only given. Nowadays biomedical application of atmospheric pressure glow discharges (APGD) known as plasma medicine has received growing attention due to their economic and technological impact. Although RF plasma has high density of reactive specie, the gas temperature of hundreds degrees prevent its biomedical application. However, the pulsed RF plasma decreased the gas temperature to 310±10k by reducing RF power ontime. Although the different RF power on time leaded to the changing of pulsed RF plasma reactivity, our study suggested on the condition of the same RF power on time, the changing of pulse frequency and duty on cycle affected the peak current, optical emission intensity of the pulsed RF plasma. On the other hand, the parallel plate discharge has the advantage of large area processing, so the sterilization effect of the pulsed RF discharge was analyzed by putting a semipermeable membrane with E. Coli on the electrode. Finally, because plasma jet can provide plasma not spatially bound, by keeping the same power on duty cycle, the difference of propagation characteristics between the pulsed RF plasma jet array and the pulsed DC jet array are analyzed. The plasma plume structure of pulsed RF jet array is same as stable DC discharge, and the strong electric field leaded to growing plasma bullet in the launching period of the pulsed DC jet array. The reactivity of pulsed RF jet array is stronger than that of pulsed DC jet array.

Published in:

Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on

Date of Conference:

8-13 July 2012