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A MEMS Bistable Device With Push-On–Push-Off Capability

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2 Author(s)
Hen-Wei Huang ; Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei, Taiwan ; Yao-Joe Yang

This letter presents a novel MEMS bistable device that requires only one independent driving source for switching between its two stable states. The proposed device employs a mechanically push-on-push-off mechanism consisting of two curved beam structures. An integrated V-beam actuator (VBA) is used as the only actuation component. The proposed device can be easily realized on a silicon-on-insulator wafer by using the inductively coupled plasma (ICP) etching process with a single photomask. Preliminary measurement results show that a 30-ms pulse of 7.2 V applied to the VBA can drive the device from the off state to the on state, and a 50-ms pulse of 7.2 V can release the device from the on state back to the off state. Transient displacement results measured by using a vibrometer are also provided.

Published in:

Microelectromechanical Systems, Journal of  (Volume:22 ,  Issue: 1 )