This paper deals with the tip tilt occurring in scanning force microscopy during contact. Tangential forces lead to affect the localization of the measurement and prevent the quantification of local contact stiffness. Both are crucial for an accurate mechanical characterization of materials with high spatial resolution. Specific W-shaped cantilevers, using a mechanical compensating mechanism, have been designed to keep the tip vertical and get around these problems. They have been simulated with finite-element softwares and validated experimentally on the scanning microdeformation microscope. The promising results show that the principle could be used in other types of scanning force microscopies.
Published in:
Sensors Journal, IEEE
(Volume:13
,
Issue:
4
)
Date of Publication:
April 2013
- Page(s):
-
1340
-
1346
- ISSN :
-
1530-437X
- INSPEC Accession Number:
-
13323510
- Digital Object Identifier :
-
10.1109/JSEN.2012.2232784
- Product Type:
-
Journals & Magazines
- Date of Publication :
-
10 December 2012
- Date of Current Version :
-
15 February 2013
- Issue Date :
-
April 2013
- Sponsored by :
-
IEEE Sensors Council