Frequency Multiplexed MEMS Actuators and Switches

We report a novel method for addressing a set of microelectromechanical system (MEMS) actuators using an oscillating signal to drive an actuator into resonance and then into a latched state. Based on the unique frequency response characteristics of individual actuators, multiplexed addressing of multiple devices in an array can be accomplished by selecting and combining appropriate driving signals on a single control line. This simplified control architecture of MEMS actuators eases implementation of multiple devices and enables large-scale integration of programmable microactuator systems, such as MEMS switch arrays.