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Sensing properties of infrared nanostructured plasmonic crystals fabricated by electron beam lithography and argon ion milling

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9 Author(s)
Quan, Baogang ; Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Science, Beijing 100080, China ; Liu, Zhe ; Li, Lin ; Sun, Weijie
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In this paper, the authors report on the fabrication, theory simulation, and optical characterization of X-shaped nanoscale plasmonic crystals (PCs) and their application in biosensors. X-shaped PCs with 30 nm feature line-widths and different intersection angles were fabricated by a combination of electron beam lithography and argon ion beam milling techniques. Both experimental measurement and finite-difference time-domain simulations were employed to study the transmission properties of PCs under two different incident light polarizations. With the reduction of the symmetry of the X-shaped PCs, the transmission spectra of PCs show a new peak at ∼900 nm in the near-infrared region, and the optical experimental results were consistent with the simulated results. Plasmonic crystal-based biosensors were then prepared by self-assembly of octadecanethiol to the PCs followed by biotinylation and immobilization of streptavidin to the biosensor. The sensing properties of the PC-based biosensors with a 30° intersection angle, which is enhanced by a localized surface plasmon resonance with the asymmetry of the PC, are superior to those with a larger intersection angle in biosensor application. The robust fabrication technique and the strategy for enhancing the sensitivity of the biosensor endow X-shaped PCs with a great competitive advantage over other candidates.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:30 ,  Issue: 6 )