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Development of optical system with rotational misalignment adjustment for multi-optical-probe confocal microscopy

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4 Author(s)
Lim, Jiseok ; Max Planck Institute for Biophysical Chemistry, Am Fassberg 10, 37077 Göttingen, Germany ; Jung, Myungki ; Young Hwang, Seo ; Kang, Shinill

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Optical scanning confocal microscopy enables high-resolution imaging and optical sectioning for three-dimensional imaging. Technologies to improve confocal microscopy are being developed for applications, such as real-time bioinspection, fluorescence sample imaging, and ultra-high-resolution measurement. Recently, the need for high-resolution large-area inspection of electronics has been increasing rapidly, including large-area display panels. Therefore, the authors constructed an optical system for multi-optical-probe confocal microscopy. A 10 × 10 micro-objective-lens array was fabricated with high fidelity using an ultraviolet nanoimprinting process. To investigate the utility of this system, 1 × 1 mm2 images were examined using an XY-translation nanostage scanning with a travel length of 100 μm.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:30 ,  Issue: 6 )