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Flexible Sputter-Deposited Carbon Strain Sensor

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4 Author(s)
Tata, U. ; Dept. of Electr. Eng., Univ. of Texas at Arlington, Arlington, TX, USA ; Hung Cao ; Nguyen, C.M. ; Jung-Chih Chiao

In this letter, we report a piezoresistive amorphous carbon strain sensor fabricated on a flexible polyimide substrate. Amorphous carbon was sputter-deposited onto a 125-μm-thick polyimide film and the strain gauges were tailored using laser micromachining. The strain sensors were tested by using a cantilever setup to obtain sensitivity, hysteresis, repeatability, and dynamic response. Gauge factors in the range of 6-9 have been achieved.

Published in:

Sensors Journal, IEEE  (Volume:13 ,  Issue: 2 )