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CMOS compatible subwavelength grating couplers for silicon integrated photonics

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6 Author(s)
Xiaochuan Xu ; Microelectronics Research Center, The University of Texas at Austin, 78758, USA ; Harish Subbaraman ; John Covey ; David Kwong
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We demonstrate a through etched subwavelength grating coupler, which can be patterned together with other photonic components. It achieves a very high coupling efficiency of 59% with a 3dB bandwidth of 60 nm.

Published in:

IEEE Photonics Conference 2012

Date of Conference:

23-27 Sept. 2012