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Chemically-etched ultra-high-Q micro-cavities on a silicon chip

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4 Author(s)
Tong Chen ; Thomas J. Watson, Sr., Lab. of Appl. Phys., California Inst. of Technol., Pasadena, CA, USA ; Hansuek Lee ; Jiang Li ; Vahala, K.

Optical resonators with quality factor as high as 875 million are demonstrated. These silicon-chip-based devices are fabricated using only lithography and chemical etching, thereby expanding integration opportunities and possible applications.

Published in:

Photonics Conference (IPC), 2012 IEEE

Date of Conference:

23-27 Sept. 2012