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A silicon pressure sensor with stainless diaphragm for high temperature and chemical application

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6 Author(s)
Terabe, H. ; Toyoda Machine Works Ltd., Kariya, Japan ; Arashima, H. ; Ura, N. ; Suzuki, K.
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This paper shows how to use silicon pressure sensors for high temperature and silicon corrosive environments. A sensor chip has been developed to be used in high temperature up to 300°C, which has SOI (Silicon On Insulator) structure employing Si/Al2O3/Si double hetero-epitaxial technology[1]. The sensor chip is covered with a stainless diaphragm, and never contact with media of pressure. In experiments, a pressure sensor which is designed for a range of 1 MPa has a sensitivity of 18.3 mV/V/MPa. After compensating of the temperature influence, a maximum offset error of 1.3%F.S., and a maximum sensitivity error of 1.1%F.S. from 50°C to 200°C were obtained

Published in:

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on  (Volume:2 )

Date of Conference:

16-19 Jun 1997