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Simple and low cost fabrication of embedded micro-channels by using a new thick-film photoplastic

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5 Author(s)
Guerin, L.J. ; Inst. of Microsyst., Swiss Fed. Inst. of Technol., Lausanne, Switzerland ; Bossel, M. ; Demierre, M. ; Calmes, S.
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In this paper we describe new ways to realise micro-channels. The used technologies are based on a novel thick-film photoplastic, the SU-8. This photoresist has outstanding properties, allowing the realisation of high aspect ratio microstructures. It is a simple and low-cost fabrication process. The micro channels developed in this work will be used for the realisation of thermal flow-sensors

Published in:

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on  (Volume:2 )

Date of Conference:

16-19 Jun 1997