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Silicon based replication technology of 3D-microstructures by conventional CD-injection molding techniques

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6 Author(s)
Larsson, O. ; IMC-Ind. Microelectron. Center, Kista, Sweden ; Ohman, O. ; Billman, A. ; Lundbladh, L.
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A novel and rapid mass fabrication process for replicated polymeric 3D-microstructures of almost any arbitrary geometrical shape is presented. In this approach the master is fabricated using relatively inexpensive silicon bulk micromachining (wet or dry etching). This together with a slightly modified conventional CD-injection molding process can substantially reduce the production cycle times. The process was used to form microstructured replicas with micrometer precision and with structure depths down to 470 μm at a cycle time less than 10 seconds

Published in:

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on  (Volume:2 )

Date of Conference:

16-19 Jun 1997