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A silicon microsystem-miniaturised infrared spectrometer

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4 Author(s)
Blomberg, M. ; VTT Electron., Finland ; Rusanen, O. ; Keranen, K. ; Lehto, A.

A miniaturised multipurpose infrared analyser has been developed. This comprises an electrically modulatable infra-red source, an electrically tunable Fabry-Perot pass band filter, an integrated circuit and a photodetector, all silicon microfabricated and assembled on the same silicon substrate. The infrared source and the detector are monolithically integrated in the substrate. The Fabry-Perot interferometer is flip-chip bonded and the IC-circuit wire-bonded. The whole spectrometer assembly is in a DIL package, having holes for the incoming and outgoing radiation. The dimensions of the spectrometer silicon substrate are 5×15 mm2

Published in:

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on  (Volume:2 )

Date of Conference:

16-19 Jun 1997

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