By Topic

Characteristics of a highly symmetrical miniature capacitive triaxial accelerometer

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Lo╠łtters, J.C. ; MESA Res. Inst., Twente Univ., Enschede, Netherlands ; Olthuis, W. ; Veltink, P.H. ; Bergveld, P.

A highly symmetrical cubic capacitive triaxial accelerometer for biomedical applications has been designed, realised and tested. The sensors are available in two outer dimensions, namely 2×2×2 and 5×5×5 mm3. The devices are mounted on a standard IC package for easy testing. Features of the sensor are a highly symmetrical cubic structure, capacitive coupling of the high frequency input voltage to the seismic mass and the use of the polymers polydimethylsiloxane (PDMS) as spring material between the capacitor plates and the mass and polyimide (PI) as flexible interconnection layer between the capacitor plates. The sensor structure and its basic operating principle, its mathematical mass-spring-damper model and the necessary cleanroom technology are described. The measurement results show a sensitivity of ~0.15 V/(m/s2) with a corresponding resolution of 0.01 m/s2, an off-axis sensitivity of <5 %, a good linearity in the output voltage for accelerations up to at least 50 m/s2 and a bandwidth of DC 500 Hz

Published in:

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on  (Volume:2 )

Date of Conference:

16-19 Jun 1997