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Thermal buckling actuator for micro relays

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4 Author(s)
Seki, T. ; Central Res. & Dev. Lab., OMRON Corp., Ibaraki, Japan ; Sakata, M. ; Nakajima, T. ; Matsumoto, M.

An actuator for micromachined relays has been investigated. The actuator is fabricated by the sealed-cavity process, a micromachining technology. It has a thin Si clamped-clamped beam which is deformed by buckling due to thermal SiO2 built-in stress and thermal stress. The actuator size is 2.5 mm(L)×0.5 mm(W)×0.02 mm(T). 25-micron deflection at the center point and 2.0 gf force were obtained with 27 V/25 mA input power

Published in:

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on  (Volume:2 )

Date of Conference:

16-19 Jun 1997