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FullVision?? Endpoint for CMP of SiGe Fin Structures

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8 Author(s)

FullVision(TM) is a real time, in situ optical endpoint system that enables the polish of SiGe fin structures with superior planarization performance. A production-proven endpoint tool for stop-in-film and stop-on-film applications, FullVision(TM) has been demonstrated for use in the CMP of advanced channel material films deposited by selective epitaxy. Keywords: Endpoint, FullVision(TM), Chemical-mechanical Polishing, FinFET, SiGe

Published in:

Planarization/CMP Technology (ICPT 2012), International Conference on

Date of Conference:

15-17 Oct. 2012