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Efficient design and optimization of MEMS by integrating commercial simulation tools

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4 Author(s)
Nagler, O. ; Fraunhofer Inst. for Solid State Technol., Munchen, Germany ; Trost, M. ; Hillerich, B. ; Kozlowski, F.

This article presents a simulation tool for developing and characterizing microelectromechanical systems (MEMS). The advantage of the demonstrated modular concept is due to the flexibility of the program structure and to the reduction of costly software support by integrating commercial simulators. A novel application manager controls the different subprograms by specific drivers and ensures the data management for parametric studies. So complex system behaviour and the interactions of MEMS components can be analysed and optimated during the design process, resulting in shorter manufacturing cycles

Published in:

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on  (Volume:2 )

Date of Conference:

16-19 Jun 1997