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A CMOS integrated surface micromachined angular rate sensor: its automotive applications

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8 Author(s)
Sparks, D.R. ; Delco Electron. Corp., Kokomo, IN, USA ; Zarabadi, S.R. ; Johnson, J.D. ; Jiang, Q.
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A CMOS integrated, surface micromachined angular rate sensor utilizing an electroformed vibrating metal ring structure on a silicon IC has been developed. Substantial signal conditioning circuitry may be included on the IC with the vibrating structure. Tests of the sensor demonstrate that its performance is equivalent to that required for a variety of automotive angular rate applications

Published in:
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on  (Volume:2 )

Date of Conference: 16-19 Jun 1997

Page(s):
851 - 854 vol.2
Meeting Date :
16 Jun 1997-19 Jun 1997
Print ISBN:
0-7803-3829-4
INSPEC Accession Number:
5766540
Conference Location :
Chicago, IL
Digital Object Identifier :
10.1109/SENSOR.1997.635235
Product Type:
Conference Publications

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