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Quasi-thickness-shear waves in thin-film piezoelectric resonators of ZnO and AlN with tilted C-Axis

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3 Author(s)
Xiaoshan Cao ; Sch. of Civil Eng. & Archit., Xi''an Univ. of Technol., Xi''an, China ; Feng Jin ; Jiashi Yang

We study the propagation of Lamb waves in a piezoelectric plate of crystals of class 6mm with tilted c-axis. Dispersion relations for waves in ZnO and AlN plates with a few specific tilting angles of the c-axis are obtained. Displacement amplitude and phase angle distributions along the plate thickness are also calculated. It is shown that for certain values of the tilting angle of the c-axis, there exist long waves with a dominating thickness-shear component. The results further support the possibility of thin-film resonators operating with thickness-shear modes.

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Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:59 ,  Issue: 11 )