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Design and optimization of voice coil actuator for six degree of freedom active vibration isolation system using Halbach magnet array

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3 Author(s)
Kim, MyeongHyeon ; Department of Mechanical Engineering, KAIST, Daejeon, South Korea ; Kim, Hyunchang ; Gweon, Dae-Gab

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This paper describes the design, modeling, optimization, and validation of an active vibration isolation system using a voice coil motor. The active vibration isolating method was constructed with a passive isolator and an active isolator. A spring was used for passive isolating; an actuator was used for active isolating. The proposed active vibration isolation system (AVIS) can isolate disturbances for many kinds of instruments. Until now, developed AVIS were able to isolate a six degree-of-freedom disturbance effectively. This paper proposes the realization of such a six degree-of-freedom active vibration isolation system that can work as a bench top device for precision measuring machines such as atomic force microscope, scanning probe microscope, etc.

Published in:

Review of Scientific Instruments  (Volume:83 ,  Issue: 10 )

Date of Publication:

Oct 2012

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