By Topic

Bias Contributions in a MEMS Tuning Fork Gyroscope

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)

This paper analyzes the bias sources of mechanical and electrostatic origin in a tuning fork microelectromechanical systems (MEMS) gyroscope. In a gyroscope which is symmetrical and has no defect, there would be no bias; technological defects should be investigated in order to identify and quantify bias sources, which arise from quadrature and in-phase errors. Technological dispersions within the etching step of the mechanical structure are a major source of errors. Dispersions at the scale of a single MEMS particularly matter by impacting springs and electrodes. Design rules are defined for a z-axis gyroscope in order to curb these errors: In particular, specific drive springs, which are very stiff in the sense direction, and a mechanical decoupling between drive and sense are indicated to decrease errors. Local dispersion of the width of beams has been assessed with a network of electrical test structures and leads to a local standard deviation of 3-6 nm at the scale of a MEMS gyroscope device. The optimized design enables to obtain a total error of less than 300°/s on very compact z-axis gyroscopes with an area of mechanical part of 0.5 mm2.

Published in:

Microelectromechanical Systems, Journal of  (Volume:22 ,  Issue: 2 )