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Direct observation of grain growth from molten silicon formed by micro-thermal-plasma-jet irradiation

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8 Author(s)
Hayashi, Shohei ; Department of Semiconductor Electronics and Integration Science, Graduate School of Advanced Sciences of Matter, Hiroshima University, 1-3-1 Kagamiyama, Higashi-Hiroshima, Hiroshima 739-8530, Japan ; Fujita, Yuji ; Kamikura, Takahiro ; Sakaike, Kohei
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Phase transformation of amorphous-silicon during millisecond annealing using micro-thermal-plasma-jet irradiation was directly observed using a high-speed camera with microsecond time resolution. An oval-shaped molten-silicon region adjacent to the solid phase crystallization region was clearly observed, followed by lateral large grain growth perpendicular to a liquid-solid interface. Furthermore, leading wave crystallization (LWC), which showed intermittent explosive crystallization, was discovered in front of the moving molten region. The growth mechanism of LWC has been investigated on the basis of numerical simulation implementing explosive movement of a thin liquid layer driven by released latent heat diffusion in a lateral direction.

Published in:

Applied Physics Letters  (Volume:101 ,  Issue: 17 )

Date of Publication:

Oct 2012

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