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Yield impact evaluation of abnormal APC data

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1 Author(s)
Chen Chin-Hui ; ProMOS Technologies Inc.

When a lot yield is low, it used to survey the related APC data whether it shows the abnormal signal and could be detected early to minimize the yield loss. The paper proposes to identify the yield impact by using the abnormal data detected by checking the trend or from the frequency alarm of FDC.

Published in:

e-Manufacturing & Design Collaboration Symposium (eMDC), 2012

Date of Conference:

4-4 Sept. 2012