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Power Noise in TSV-Based 3-D Integrated Circuits

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3 Author(s)
Savidis, I. ; Dept. of Electr. & Comput. Eng., Univ. of Rochester, Rochester, NY, USA ; Kose, S. ; Friedman, E.G.

A three-dimensional (3-D) test circuit examining power grid noise in a 3-D integrated stack has been designed, fabricated, and tested. Fabrication and vertical bonding were performed by MIT Lincoln Laboratory for a 150 nm, three metal layer SOI process. Three wafers are vertically bonded to form a 3-D stack. Noise analysis of three power delivery topologies is described. Calibration circuits for a source follower sense circuit compare the different power delivery topologies as well as the separate 3-D stacked circuits. The effect of the through silicon via (TSV) density on the noise profile of a 3-D power delivery network is experimentally described. A comparison of the peak noise for each topology with and without board level decoupling capacitors, and resonant behavior is provided, and suggestions for enhancing the design of a 3-D power delivery network are offered.

Published in:

Solid-State Circuits, IEEE Journal of  (Volume:48 ,  Issue: 2 )