By Topic

RF-microswitch on the basis of aluminum MEMS technology

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
A. G. Chernykh ; Belarusian State Univ. of Inf. & Radio Electron., Minsk, Belarus ; A. S. Tymoshchyk ; I. L. Baranov ; O. M. Komar

The RF MEMS microswitch technology on the basis of aluminum and anodic aluminum oxide as the working and sacrificial layers, respectively are considered. It is shown that the use of local anodization of aluminum eliminates the need for additional procedures of sacrificial layers formation. Due to the lack of high-temperature operation the proposed technology allows creating the micromechanical systems on a single chip with the control electronics.

Published in:

Microwave and Telecommunication Technology (CriMiCo), 2012 22nd International Crimean Conference

Date of Conference:

10-14 Sept. 2012