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Wet-etched ridge waveguides in y-cut lithium niobate

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3 Author(s)
Rei-Shin Cheng ; Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan ; Tzyy-Jiann Wang ; Wang, Way‐Seen

By the technique of nickel indiffusion proton exchange (NIPE) and the technique of buffered proton exchange (PE) melt, wet-etched ridge waveguides in y-cut LiNbO3 are fabricated for the first time. The fabricated ridge waveguides have smooth surfaces and are good enough for low-loss waveguides. Moreover, a ridge waveguide Mach-Zehnder modulator in y-cut LiNbO3 is fabricated. The measured half-wave voltage is about 30% lower than that of a conventional modulator. The wet-etched ridge waveguides in y-cut and z-cut substrates are also characterized for comparison

Published in:

Lightwave Technology, Journal of  (Volume:15 ,  Issue: 10 )