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This paper presents a novel autonomous thin film magnetic field sensor consisting of a tri-layer giant magnetoimpedance sensor and a surface acoustic wave transponder. Double and single electrode interdigital transducer (IDT) designs are employed and compared. The integrated sensor is fabricated using standard microfabrication technology. The results show the double electrode IDT has an advantage in terms of the sensitivity. In order to optimize the matching component, a simulation based on P-matrix is carried out. A maximum change of 2.4 dB of the reflection amplitude and a sensitivity of 0.34 dB/Oe are obtained experimentally.
Date of Publication: Nov. 2012