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Amorphous CoxFe1-x-B particles with magnetic softness were fabricated by chemical reduction of metal ions. Fabrication conditions to obtain particles with good magnetic softness are described. CoxFe 1-x-B particles with x= 0.90-0.95 exhibit superb softness because of their nearly zero-magnetostrictive property. The soft properties of the particles are thermally stable compared to other compositions such as Fe-B-P or Co50 Fe50-B. Chains of CoxFe1-x-B particles with x=0.95 produced in a magnetic field were studied in detail. The high permeability feature associated with the high aspect ratio of the chain shape exhibits only a slight change after annealing up to 400 degrees. The frequency dispersion of initial permeability exhibits two resonance peaks that are ascribed to the shape anisotropy of the chains.