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A 64 Gb MLC NAND flash memory in 19 nm CMOS technology has been developed. By adopting one-sided all bit line (ABL) architecture, the single cell array configuration, bit line bias acceleration (BLBA) and BC states first program algorithm, the smallest 64 Gb die size in 2 bit/cell is achieved with high performance of 15 MB/s program throughput. Program suspend and erase suspend functions are introduced to improve the read latency. High speed toggle mode interface of 400 Mbit/sec/pin at VCCQ = 1.8 V is also realized.