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Solid state: Molecular beam epitaxy: Streams of molecules in a vacuum chamber build devices ‘from the atom up’

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2 Author(s)
Panish, M.G. ; Bell Labs., Murray Hill, NJ, USA ; Cho, A.Y.

After years of research, molecular beam epitaxy (MBE), a process for forming thin, single-crystal semiconductor structures in an ultrahigh vacuum, is beginning to pay dividends. Microwave field-effect transistors, semiconductor lasers, millimeter-wave detectors, and a variety of other high-performance devices have been made from the multilayer crystals grown by the process. A greater variety of devices and still higher performance can be expected.

Published in:

Spectrum, IEEE  (Volume:17 ,  Issue: 4 )