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Capacitive micromachined ultrasonic transducer based tilt sensing

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7 Author(s)
Yu, Hongbin ; Institute of Microelectronics, Agency for Science, Technology and Research (A*Star), Singapore Science Park II, Singapore 117685 ; Guo, Bin ; Haridas, Kuruveettil ; Lin, Tsu-Hui
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In this paper, a tilt sensing mechanism based on the capacitive micromachined ultrasound transducers (CMUTs) is presented. By measuring the difference in the time of flight of various pulse-echo signals from different CMUT transmitting elements to one common receiving element in the oil bath, the tilt angle of the oil surface can be determined. With the proposed device, the maximum tilt angles of 20° and 28° have been measured in the clockwise and counterclockwise directions, respectively, and the difference between the measured and the theoretical values of the tilt angle was found to be within 0.05° during the whole test.

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Applied Physics Letters  (Volume:101 ,  Issue: 15 )