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Backend monolithic integration of passive optical devices on 90nm bulk CMOS chip

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2 Author(s)
Lee, Y.H.D. ; Cornell Nanophotonics Group, Cornell Univ., Ithaca, NY, USA ; Lipson, M.

We demonstrate optical resonators and waveguides monolithically integrated on a CMOS die through post-backend processing. Both CMOS process integrity and optical performance are verified and measured.

Published in:

Lasers and Electro-Optics (CLEO), 2012 Conference on

Date of Conference:

6-11 May 2012