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We demonstrate a carrier-injection silicon Mach-Zehnder optical modulator with high optical bandwidth by adopting two symmetric arms. The dynamic extinction ratio at the speed of 12.5 Gb/s is 7.0 ~ 8.9 dB in the wavelength range from 1525 nm to 1565 nm. The phase shifter is only 100 μm and the figure of merit Vπ·L is 0.0155 V·cm.
Date of Conference: 29-31 Aug. 2012