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Note: Development of a microfabricated sensor to measure thermal conductivity of picoliter scale liquid samples

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4 Author(s)
Park, Byoung Kyoo ; Department of Mechanical Engineering, POSTECH, Pohang 790-784, South Korea ; Yi, Namwoo ; Park, Jaesung ; Kim, Dongsik

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This paper presents a thermal analysis device, which can measure thermal conductivity of picoliter scale liquid sample. We employ the three omega method with a microfabricated AC thermal sensor with nanometer width heater. The liquid sample is confined by a micro-well structure fabricated on the sensor surface. The performance of the instrument was verified by measuring the thermal conductivity of 27-picoliter samples of de-ionized (DI) water, ethanol, methanol, and DI water-ethanol mixtures with accuracies better than 3%. Furthermore, another analytical scheme allows real-time thermal conductivity measurement with 5% accuracy. To the best of our knowledge, this technique requires the smallest volume of sample to measure thermal property ever.

Published in:

Review of Scientific Instruments  (Volume:83 ,  Issue: 10 )