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Multilayer conformal coating of highly dense Multi-Walled Carbon Nanotubes bundles

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4 Author(s)
Giuseppe Fiorentino ; Delft Institute of Microsystems and Nanoelectronics, Faculty of Electrical Engineering, Mathematics and Computer Science, Delft University ofTechnology, Feldmannweg 17, 2628CT, The Netherlands ; Sten Vollebregt ; Ryoichi Ishihara ; Pasqualina M. Sarro

Atomic layer deposition (ALD) is used to deposit ultra-thin and conformal films on flat substrates, porous structures, micro/nano particles and high aspect ratios structures. In this paper we demonstrate the multilayer conformal coating of highly dense Multi-walled Carbon Nanotubes (MWCNTs) bundles grown as islands onto an insulating layer. The multilayered coating consists of alternating layers of dielectric (Aluminium Oxide) and conductive (Titanium Nitride) materials. The coated carbon nanotubes bundles can work as fully integrated nanoelectronic devices and sensors.

Published in:

Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on

Date of Conference:

20-23 Aug. 2012