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Surface plasmon resonance for digital imaging

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7 Author(s)
Cumming, D.R.S. ; Sch. of Eng., Univ. of Glasgow, Glasgow, UK ; Qin Chen ; Walls, K. ; Drysdale, T.D.
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We present the design, implementation and test of a CMOS image sensor filter technology based on the exploitation of surface plasmon resonance. We demonstrate precise design and control of the spectral response of filters made in a single aluminium film. The film is patterned using electron beam lithography and reactive ion etching. Unlike conventional filter technology for CMOS, all the desired colour responses can be obtained in a single lithographic sequence. We show that the photocurrent from the sensors has the required spectral response after fabrication.

Published in:

Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on

Date of Conference:

20-23 Aug. 2012