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Millimeter-scale scanning MEMS mirror with sub-wavelength micro-hole arrays for terahertz wave scanning

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4 Author(s)
Hyeon-Cheol Park ; Korea Adv. Inst. of Sci. & Technol. (KAIST), Daejeon, South Korea ; Jung-Hwan Lee ; Sang-Gil Park ; Ki-Hun Jeong

Millimeter scale scanning MEMS mirror with sub-wavelength microhole arrays has been successfully demonstrated for terahertz wave scanning. Sub-wavelength microhole arrays provide both high reflectivity at THz waves and low air damping during the mirror scanning.

Published in:

Optical MEMS and Nanophotonics (OMN), 2012 International Conference on

Date of Conference:

6-9 Aug. 2012