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Design and fabrication of a near-field scanning optical microscope probe by CMOS-MEMS

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4 Author(s)
Liou, C.H. ; Dept. of Electr. & Comput. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan ; Chiu, Y. ; Shieh, H.P.D. ; Chiou, J.C.

A near-field scanning optical microscope (NSOM) probe based on CMOS-MEMS technology is proposed. The side pin-hole photodetector and the on-chip transimpedance amplifier were characterized. An optical profile measurement by using the fabricated device was performed.

Published in:

Optical MEMS and Nanophotonics (OMN), 2012 International Conference on

Date of Conference:

6-9 Aug. 2012